Marie Curie Actions
Project funded by the EC within the 6th Framework Programme
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3C-SiC Material
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Devices
a)
Fabrication facilities
Clean room, direct writing lithography
Clean room, AFM lithography
Clean room, RTCVD annealing
b)
Devices made of 3C or 4H
Schematic drawing of a targeted high Electron Mobility Transistor (HEMT) made of 3C/6H-SiC heterostructure
UV detectors made
of 4H-SiC
Top view of a VDMOS made in 4H-SiC
Schottky rectifier made of 4H-SiC
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